Fabrication of arbitrarily shaped microelectrodes by electrochemical etching

被引:8
|
作者
Lim, HJ
Lim, YM
Kim, SH
机构
[1] Korea Adv Inst Sci & Technol, Dept Engn Mech, Yusong Gu, Taejon 305701, South Korea
[2] Samsung Econ Res Inst, Technol Ind Dept, Youngsan Ku, Seoul 140702, South Korea
关键词
electrochemical etching; microelectrode; shape estimation;
D O I
10.1143/JJAP.42.1479
中图分类号
O59 [应用物理学];
学科分类号
摘要
Some conventional machining methods have been developed to machine microelectrodes. However, these methods still require too much time and too many resources. This paper uses electrochemical etching as an alternative method for the simple and cheap fabrication of microelectrodes. Electrochemical etching is usually considered an appropriate method of producing sharp probes. However, it is possible for the entire shape of an electrode to be controlled under certain conditions such as the immersed length, the applied current, and the etching time. After developing a method to estimate the electrode shape, we produced some electrodes by generating etching conditions. Stepped and punch shapes were fabricated. These have applications in the manufacturing of operation utensils, measurement tips, and machining tools.
引用
收藏
页码:1479 / 1485
页数:7
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