Applications of Scanning Electrical Force Microscopy

被引：8
|
作者：
Muller, F [1 ]
Muller, AD [1 ]
Hietschold, M [1 ]
Kammer, S [1 ]
机构：
[1] TOPOMETRIX CORP,SANTA CLARA,CA 95054
来源：
MICROELECTRONICS AND RELIABILITY | 1997年 / 37卷 / 10-11期
关键词：
D O I：
10.1016/S0026-2714(97)00127-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The capabilities of Scanning Electrical Force Microscopy (SEFM) based on non-contact AFM (atomic force microscopy) concerning the characterization of microelectronic structures of silicon are presented. Surface potential differences due to carrier generation and capacitance differences due to oxide layers are discussed at examples of lateral and cross-sectional images of a resistance and a MOS-structure. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码：1631 / 1634
页数：4
相关论文
共 50 条
  • [1] Applications of scanning force microscopy
    Leijala, A
    Penttinen, I
    Korhonen, AS
    Utriainen, M
    [J]. FRONTIERS IN NANOSCALE SCIENCE OF MICRON/SUBMICRON DEVICES, 1996, 328 : 111 - 123
  • [2] Scanning force microscopy: New instrumentation and applications
    Zasadzinski, JA
    [J]. CURRENT OPINION IN COLLOID & INTERFACE SCIENCE, 1996, 1 (02) : 264 - 269
  • [3] BIOCHEMICAL AND STRUCTURAL APPLICATIONS OF SCANNING FORCE MICROSCOPY
    BUSTAMANTE, C
    ERIE, DA
    KELLER, D
    [J]. CURRENT OPINION IN STRUCTURAL BIOLOGY, 1994, 4 (05) : 750 - 760
  • [4] APPLICATIONS OF SCANNING TUNNELING MICROSCOPY AND FORCE MICROSCOPY TO ELECTROCHEMISTRY AND BIOCHEMISTRY
    HANSMA, PK
    MARTI, O
    SCHNEIR, J
    DRAKE, B
    GOULD, S
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 195 : 116 - COLL
  • [5] LOCAL ELECTRICAL DISSIPATION IMAGED BY SCANNING FORCE MICROSCOPY
    DENK, W
    POHL, DW
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (17) : 2171 - 2173
  • [6] FUNDAMENTALS AND SPECIAL APPLICATIONS OF NONCONTACT SCANNING FORCE MICROSCOPY
    HARTMANN, U
    [J]. ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS, VOL 87, 1994, 87 : 49 - 200
  • [7] ELECTRICAL CHARACTERIZATION OF INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY
    BOHM, C
    ROTHS, C
    MULLER, U
    BEYER, A
    KUBALEK, E
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1994, 24 (1-3): : 218 - 222
  • [8] Applications of Scanning Probe-Atomic Force Microscopy in Nanobioelectronics
    Choi, Eunmi
    Kim, Areum
    Son, Hyungbin
    Pyo, Sung Gyu
    [J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2014, 14 (01) : 924 - 931
  • [9] Metrological large range scanning force microscopy and its applications
    Dai, G
    Pohlenz, F
    Danzebrink, HU
    Xu, M
    Hasche, K
    Wilkening, G
    [J]. MEASURE AND QUALITY CONTROL IN PRODUCTION, 2004, 1860 : 569 - 587
  • [10] Scanning probe - atomic force microscopy: new developments and applications
    Valdre, G.
    Moro, D.
    Ulian, G.
    [J]. EMAS 2013 WORKSHOP: 13TH EUROPEAN WORKSHOP ON MODERN DEVELOPMENTS AND APPLICATIONS IN MICROBEAM ANALYSIS, 2014, 55
12345