256x256 InSb focal plane arrays

被引：6

作者：

Gau, YT ^{[1
]}

Dai, LK ^{[1
]}

Yang, SP ^{[1
]}

Weng, PK ^{[1
]}

Huang, KS ^{[1
]}

Liu, YN ^{[1
]}

Chiang, CD ^{[1
]}

Jih, FW ^{[1
]}

Cherng, YT ^{[1
]}

Chang, H ^{[1
]}

机构：

[1] Chung Shan Inst Sci & Technol, Mat & Electroopt Div, Tao Yuan 325, Taiwan

来源：

OPTOELECTRONIC MATERIALS AND DEVICES II | 2000年 / 4078卷

关键词：

InSb; focal plane array; readout integrated circuit (ROIC); indium bump; hybridization;

D O I：

10.1117/12.392175

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 256x256 backside illluminated photovoltaic indium antimonide (InSb) focal plane arrays having spectral response in the medium wavelength infrared (3 to 5 mu m) was designed and developed at Chung Shang Institute of Science and Technology for use in a variety of military and commercial applications. Operating at 77 degrees K, the arrays had a mean laboratory detectivity of 3.12x10(11) cmHz (1/2)/W with f/3 optics. The responsivity non-uniformity was 3%, and the operable yield exceeded 99%. The EPA achieves an Noise Equivalent Temperature Difference (NETD) is less than 0.025 degrees K at 300 degrees K background with f/3 optics.

引用

页码：467 / 479

页数：13

共 50 条

[1] 256X256 HYBRID HGCDTE INFRARED FOCAL PLANE ARRAYS
BAILEY, RB
KOZLOWSKI, LJ
CHEN, J
BUI, DQ
VURAL, K
EDWALL, DD
GIL, RV
BENVANDERWYCK, A
GERTNER, ER
GUBALA, MB
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (05) : 1104 - 1109
[2] Solar-blind AlGaN 256x256 p-i-n detectors and focal plane arrays
Reine, M. B.
Hairston, A.
Lamarre, P.
Wong, K. K.
Tobin, S. P.
Sood, A. K.
Cooke, C.
Pophristic, M.
Guo, S.
Peres, B.
Singh, R.
Eddy, C. R., Jr.
Chowdhury, U.
Wong, M. M.
Dupuis, R. D.
Li, T.
DenBaars, S. P.
SEMICONDUCTOR PHOTODETECTORS III, 2006, 6119
[3] SWIR HgCdTe 256x256 Focal Plane Array technology at BAE systems
Hairston, A.
Tobin, S. P.
Hutchins, A.
Marciniec, J.
Mullarkey, J.
Norton, P.
Gurnee, M.
Reine, M. B.
INFRARED DETECTORS AND FOCAL PLANE ARRAYS VIII, 2006, 6295
[4] SWIR HgCdTe 256x256 focal plane array technology at BAE systems
Hairston, A.
Tobin, S. P.
Hutchins, M.
Marciniec, J.
Mullarkey, J.
Norton, P.
Gurnee, M.
Reine, M. B.
INFRARED SPACEBORNE REMOTE SENSING XIV, 2006, 6297
[5] Solar-blind AlGaN 256x256 p-i-n detectors and focal plane arrays
Reine, M. B.
Hairston, A.
Lamarre, P.
Wong, K. K.
Tobin, S. P.
Sood, A. K.
Cooke, C.
GALLIUM NITRIDE MATERIALS AND DEVICES, 2006, 6121
[6] Development of 256x256 GaN ultraviolet imaging arrays
Huang, TZC
Mott, DB
La, A
ULTRAVIOLET AND X-RAY DETECTION, SPECTROSCOPY, AND POLARIMETRY III, 1999, 3764 : 254 - 260
[7] Monolithic integration of 256 x 256 Si microlens arrays with infrared focal plane arrays
Chen, SH
Yi, XJ
Wang, HC
Kong, LB
Ma, H
JOURNAL OF INFRARED AND MILLIMETER WAVES, 2001, 20 (05) : 340 - 342
[8] Design and fabrication of 256x256 diffractive microlens arrays on Si substrates
Yi, L
Yi, XJ
Hao, JH
CURRENT DEVELOPMENTS IN OPTICAL ELEMENTS AND MANUFACTURING, 1998, 3557 : 143 - 148
[9] 256x256 cell color ACPDP
Wang, XF
Fan, WH
Liao, JY
DISPLAY DEVICES AND SYSTEMS, 1996, 2892 : 220 - 224
[10] Monolithic integration of 256×256 Si microlens arrays with infrared focal plane arrays
Chen, Si-Hai
Yi, Xin-Jian
Wang, Hong-Chen
Kong, Ling-Bin
Ma, Hong
Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves, 2001, 20 (05): : 340 - 342

← 1 2 3 4 5 →