All-Fabric Ultrathin Capacitive Sensor with High Pressure Sensitivity and Broad Detection Range for Electronic Skin

被引:78
|
作者
Yu, Pengtao [1 ,2 ]
Li, Xin [1 ,2 ]
Li, Huayang [3 ,4 ]
Fan, Youjun [1 ]
Cao, Jinwei [3 ,4 ]
Wang, Hailu [1 ]
Guo, Zihao [1 ,2 ]
Zhao, Xuejiao [1 ]
Wang, Zhonglin [1 ,2 ]
Zhu, Guang [1 ,2 ,3 ]
机构
[1] Chinese Acad Sci, Beijing Inst Nanoenergy & Nanosyst, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Sch Nanosci & Technol, Beijing 100049, Peoples R China
[3] Univ Nottingham Ningbo China, New Mat Inst, Dept Mech Mat & Mfg Engn, Ningbo 315100, Peoples R China
[4] Chinese Acad Sci, CAS Key Lab Magnet Mat & Devices, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
关键词
flexible ultrathin sensors; high sensitivity; all-fabric structure; capacitive effect;
D O I
10.1021/acsami.1c05478
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Flexible pressure sensors have emerged as an indispensable part of wearable devices due to their application in physiological activity monitoring. To realize long-term on-body service, they are increasingly required for properties of conformability, air permeability, and durability. However, the enhancement of sensitivity remains a challenge for ultrathin capacitive sensors, particularly in the low-pressure region. Here, we introduced a highly sensitive and ultrathin capacitive pressure sensor based on a breathable all-fabric network with a micropatterned nanofiber dielectric layer, an all-fabric capacitive sensor (AFCS). This all-fabric network endows a series of exceptional performances, such as high sensitivity (8.31 kPa(-1) under 1 kPa), ultralow detection limit (0.5 Pa), wide detection range (0.5 Pa to 80 kPa), and excellent robustness (10 000 dynamic cycles). Besides, the all-fabric structure provides other properties for the AFCS, e.g., high skin conformability, super thinness (dozens of micrometers), and exceptional air permeability. Our AFCS shows promising potential in breathing track, muscle activity detection, fingertip pressure monitoring, and spatial pressure distribution, paving way for comfortable skinlike epidermal electronics.
引用
收藏
页码:24062 / 24069
页数:8
相关论文
共 50 条
  • [1] High sensitivity and broad detection range flexible capacitive pressure sensor based on rGO cotton fiber for human motion detection
    Zheng, Rongliang
    Wang, Youyuan
    Zhang, Zhanxi
    Zhang, Yanfang
    Liu, Jinzhan
    [J]. SMART MATERIALS AND STRUCTURES, 2022, 31 (02)
  • [2] ELECTROSPUN NANOFABRIC BASED ALL-FABRIC IONTRONIC PRESSURE SENSOR
    Li, Ruya
    Si, Yang
    Zhu, Zijie
    Guo, Yaojun
    Zhang, Yingjie
    Pan, Ning
    Sun, Gang
    Pan, Tingrui
    [J]. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 2215 - 2219
  • [3] Bioinspired Spinosum Capacitive Pressure Sensor Based on CNT/PDMS Nanocomposites for Broad Range and High Sensitivity
    Duan, Yanhao
    Wu, Jian
    He, Shixue
    Su, Benlong
    Li, Zhe
    Wang, Youshan
    [J]. NANOMATERIALS, 2022, 12 (19)
  • [4] High Sensitivity, Broad Working Range, Comfortable, and Biofriendly Wearable Strain Sensor for Electronic Skin
    Ma, Chao
    Wang, Meng
    Uzabakiriho, Pierre Claver
    Zhao, Gang
    [J]. ADVANCED MATERIALS TECHNOLOGIES, 2022, 7 (08)
  • [5] All-Fabric Capacitive Pressure Sensors with Piezoelectric Nanofibers for Wearable Electronics and Robotic Sensing
    Su, Min
    Fu, Jianting
    Liu, Zixiao
    Li, Pei
    Tai, Guojun
    Wang, Pengsai
    Xie, Lei
    Liu, Xueqin
    He, Ximin
    Wei, Dapeng
    Yang, Jun
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2023, 15 (41) : 48683 - 48694
  • [6] Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
    Wang, Meng
    Zhang, Hao
    Wu, Han
    Ma, Suqian
    Ren, Lei
    Liang, Yunhong
    Liu, Chunbao
    Han, Zhiwu
    [J]. BIO-DESIGN AND MANUFACTURING, 2023, 6 (03) : 243 - 254
  • [7] Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
    Meng Wang
    Hao Zhang
    Han Wu
    Suqian Ma
    Lei Ren
    Yunhong Liang
    Chunbao Liu
    Zhiwu Han
    [J]. Bio-Design and Manufacturing, 2023, (03) : 243 - 254
  • [8] Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
    Meng Wang
    Hao Zhang
    Han Wu
    Suqian Ma
    Lei Ren
    Yunhong Liang
    Chunbao Liu
    Zhiwu Han
    [J]. Bio-Design and Manufacturing., 2023, 6 (03) - 254
  • [9] Bioinspired flexible piezoresistive sensor for high-sensitivity detection of broad pressure range
    Meng Wang
    Hao Zhang
    Han Wu
    Suqian Ma
    Lei Ren
    Yunhong Liang
    Chunbao Liu
    Zhiwu Han
    [J]. Bio-Design and Manufacturing, 2023, 6 : 243 - 254
  • [10] A FLEXIBLE PRESSURE SENSOR WITH HIGH SENSITIVITY AND BROAD MEASURING RANGE
    Zhao, Shuai
    Zhu, Rong
    [J]. 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 381 - 384