Design and fabrication of microlens by microfluidic deposition method

被引：2
|
作者：
Chen, CT [1 ]
Chiu, CL [1 ]
Horng, JB [1 ]
机构：
[1] Ind Technol Res Inst, Optoelect & Syst Labs, Hsinchu 741, Taiwan
来源：
CURRENT DEVELOPMENTS IN LENS DESIGN AND OPTICAL ENGINEERING V | 2004年 / 5523卷
关键词：
microlens; fabrication; microfluidic deposition; ink-jet;
D O I：
10.1117/12.557514
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The paper presents a new processing method for design and fabrication of microlens by microfluidic deposition, in which the lenses can be formed on the media with high precise location in the fabrication process. First we may apply physical vaporization deposition (PVD) or spin coating to fabricate a thin film; secondly, the hydrophilic pattern specified by the mask of lenses can be created by photolithography, where the special lens media is made herein. Finally, the liquid solution of lens material is deposited onto the predetermined location of the lens media by the drop-on-demand fluidic actuator; thus, the microlenses are consequently formed after the complete evaporation of solvent in the solution.
引用
收藏
页码：321 / 329
页数：9
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