METAL-OXIDE BASED TOXIC GAS SENSORS

被引:0
|
作者
Lee, Duk Dong [1 ]
Choi, Nak Jin [1 ]
机构
[1] Kyungpook Natl Univ, Sch Elect Engn & Comp Sci, Taegu 702701, South Korea
来源
关键词
Tin oxide; Thick film; MEMS; Chemical warfare agents; Si process;
D O I
暂无
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Recently, there has been increasing demand for monitoring the highly toxic gases known as chemical warfare agents such as nerve, vesicant, blood, choking agents. For this purpose, metal oxide semiconductor gas sensors have been investigated and shown very promising results. In this study, thick film SnO2-based gas sensors added with Al2O3, In2O3, ZnO, and ZrO2 using alumina substrate were fabricated, and their material properties and sensing properties for the four different simulant chemical warfare agents of dimethyl methyl phosphonate, dipropylene glycol methyl ether, acetonitrile, dichloromethane have been examined. A micro sensor array with 6 devices using silicon substrate was designed and fabricated using MEMS technology to realize high sensitive and high selective sensing system with low power consumption and provide the portable chemical agents detecting system. The thick film sensing devices exhibited quite high sensitivity to the toxic gases at ppm level. And the micro sensor using MEMS technology showed high sensitivity at the device temperature of 300 degrees C which could be obtained by only 90 mW heater power consumption.
引用
收藏
页码:25 / 36
页数:12
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