Optimization of Metal Quality for Grating Coupled Surface Plasmon Resonance

被引:7
|
作者
Shibata, T. [1 ]
Ikeda, H. [1 ]
Nishiyama, H. [1 ]
Tawa, K. [2 ]
Nishii, J. [1 ]
机构
[1] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, N20W10, Sapporo, Hokkaido 0010020, Japan
[2] Natl Inst Adv Ind Sci & Technol, Osaka 5638577, Japan
关键词
Plasmon; Grating; Nanoimprint; Surface roughness; ENHANCED FLUORESCENCE; ENERGY LOSSES; GAS-DETECTION; RANGE;
D O I
10.1016/j.phpro.2013.07.029
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Silver coated gratings were fabricated using an ultraviolet nanoimprint process followed by an electron beam evaporation method. A SiO2 mold was used for the nanoimprint. The long and short range surface plasmon modes could be observed by adjusting the refractive indices of top and bottom surface layers of silver grating. The surface roughness (Ra) of silver affected the surface plasmon resonance characteristics. The deep and narrow plasmon coupling dip could be observed for the silver film with Ra less than 2 nm. (C) 2013 The Authors. Published by Elsevier B.V. Open access under CC BY-NC-ND license.
引用
收藏
页码:179 / 183
页数:5
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