Viewpoint: How clean is 'clean enough'?

被引：1

作者：

Heyns, M ^{[1
]}

DeClerck, G ^{[1
]}

机构：

[1] IMEC,ADV SEMICOND PROC DIV,LOUVAIN,BELGIUM

来源：

关键词：

D O I：

10.1109/MSPEC.1996.476729

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：52 / 53

页数：2

共 50 条

[1] How clean is clean enough?
[J]. Koh, Jane, 2000, IHS Publ Group, Libertyville, IL, United States (14):
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[10] HOW CLEAN IS CLEAN
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