Research on precision grinding processing and compensation finishing experiment for Mid-large-aperture Square Aspheric Optical Element

This paper analyzes dot-line envelope grinding principle, which is applicable to mid-large-aperture square aspheric optical element, determines the mathematical process control model based on X/Y/C three-axis aspheric grinding machine, We develop the appropriate high-precision aspheric grinding manufacturing and measurement systems software, using the plane grinding wheel to do the grinding experiments and the repeated compensation processing experiment. The experiments show that: high-precision aspheric grinding manufacturing and measurement systems software can be realized axisymmetric aspheric high-precision machining control and measurement; using compensation processing of the X/Y/C three-axis aspheric grinding machine which can effectively improve the precision PV value, surface error from the initial processing of the PV value : 12 um to the compensation processing of the PV value :3 um