Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology

被引：35
|
作者：
Williams, JD [1 ]
Wang, W [1 ]
机构：
[1] Louisiana State Univ, Dept Mech Engn, Baton Rouge, LA 70803 USA
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2004年 / 10卷 / 10期
关键词：
D O I：
10.1007/s00542-004-0396-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Most of the MEMS relays reported in the field now are based on silicon fabrication and cannot be used for power applications. In this paper, we report a research effort to microfabricate an electromagnetic relay for power applications using a multilayer UV-LIGA process. A mechanically wrapped coil was used and very simple design for the magnetic circuit was adopted to increase the design flexibility and performances. The broad material selection and the capability of making high aspect ratio microstructures of the UV-LIGA make the technology best suited for fabricating microelectromechanical relays for power applications. The prototype relay has a truly three-dimensional structure and very suitable for large power capacity applications.
引用
收藏
页码：699 / 705
页数：7
相关论文
共 50 条
  • [1] Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology
    J. D. Williams
    W. Wang
    Microsystem Technologies, 2004, 10 : 699 - 705
  • [2] UV-LIGA microfabrication of 220 GHz sheet beam amplifier gratings with SU-8 photoresists
    Joye, Colin D.
    Calame, Jeffrey P.
    Garven, Morag
    Levush, Baruch
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (12)
  • [3] UV-LIGA interferometer biosensor based on the SU-8 optical waveguide
    Shew, BY
    Kuo, CH
    Huang, YC
    Tsai, YH
    SENSORS AND ACTUATORS A-PHYSICAL, 2005, 120 (02) : 383 - 389
  • [4] Mechanism analysis of ultrasonic treatment on SU-8 swelling in UV-LIGA technology
    Du, Liqun
    Liu, Yaping
    Li, Chengbin
    MICRO & NANO LETTERS, 2011, 6 (11): : 900 - 903
  • [5] Orthogonal method for processing of SU-8 resist in UV-LIGA
    Liu, JQ
    Zhu, J
    Ding, GP
    Zhao, XL
    Cai, BC
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VII, 2001, 4557 : 462 - 466
  • [6] UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
    Malekabadi, Ali
    Paoloni, Claudio
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (09)
  • [7] Design and UV-LIGA microfabrication of an electro-statically actuated power relay
    S. J. Jeong
    W. Wang
    Microsystem Technologies, 2007, 13 : 279 - 286
  • [8] Study on the thermal swelling of SU-8 photoresist in UV-LIGA technique
    Key Lab. for Precision and Non-traditional Machining Technology, Dalian University of Technology, Dalian 116024, China
    不详
    Yadian Yu Shengguang, 2008, 5 (621-623):
  • [9] Design, fabrication and measurement of a novel 140 GHz folded waveguide based on SU-8 UV-LIGA technology
    Xie, Fuqiang
    Ding, Guifu
    Zhao, Xiaolin
    Cheng, Ping
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (08)
  • [10] Design and UV-LIGA microfabrication of an electro-statically actuated power relay
    Jeong, S. J.
    Wang, W.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2007, 13 (3-4): : 279 - 286
12345