Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps

This paper investigates the effect of radius ratio, and channel aspect ratio on the flow performance of newly introduced single and double disk viscous micropumps. A lubrication solution for the flow field, which accounts for both radius and channel aspect ratios either in single or double disk micropumps was developed and compared with available experimental data and with an approximate solution which estimates for the flow rate only in single disk pump and neglects channel aspect ratio. Additionally, a number of 3D numerical models for single and double disk micropumps were built and analyzed using the finite volume method. Pressure and drag shape factors were introduced to describe the effects of radius and channel aspect ratios on the flow rate. The values of these factors for the whole range of studied parameters are found analytically and numerically. The error in estimating the flow rate was found to be less than 10% for r(1) /r(2) > 0.2, and less than 7% for the studied range of h/w. Also, the lubrication solution was found to be in good agreement with the numerical and experimental results.