Uncertainty in measurement of semiconductor piezoresistive sensors

被引：2

作者：

Hoa, PLP ^{[1
]}

Gerlach, G ^{[1
]}

Suchaneck, G ^{[1
]}

机构：

[1] Dresden Univ Technol, Inst Solid State Elect, D-01062 Dresden, Germany

来源：

MICROSYSTEM TECHNOLOGIES | 2003年 / 9卷 / 03期

关键词：

Measurement Uncertainty; Physical Relationship; Requirement Document; Respective Measurement;

D O I：

10.1007/s00542-002-0239-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The analysis of the measurement uncertainty of piezoresistive sensors should be performed according to the ISO "Guide to the Expression of Uncertainty in Measurement" (GUM) and the requirement document EAL-R2 of the 'European co-operation for Accreditation of Laboratories'. In this work, the derivation of a model of the physical relationships between quantities in the respective measurement is demonstrated for the case of a piezoresistive sensor. The model is used to evaluate the uncertainty in measurement of semiconductor piezoresistive sensors.

引用

页码：210 / 214

页数：5

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