Study of porous alumina porosity after pore widening process

被引：2
|
作者：
Vojkuvka, L. [1 ]
Marsal, L. F. [1 ]
Pallares, J. [1 ]
机构：
[1] Univ Rovira & Virgili, ETSE, DEEA, NePhoS Nano Elect & Photon Syst, Campus Sescelades,Avda Paisos Catalans 26, Tarragona 43007, Spain
来源：
2007 SPANISH CONFERENCE ON ELECTRON DEVICES, PROCEEDINGS | 2007年
关键词：
porous alumina membranes; pore widening; porosity;
D O I：
10.1109/SCED.2007.383991
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The porosity study of self-ordered porous alumina membranes (PAMs) after pore widening process is described. The PAMs were fabricated using aluminum foils oxidized in oxalic acid via a two step anodization process. The as-produced PAMs samples were subsequently etched in phosphoric acid solution to widen the pores. The morphology of several samples with modified pores was examined using scanning electron microscopy (SEM) and then the SEM images were analyzed in order to calculate the porosity of the PAMs. The porous alumina membranes with tunable geometrical properties can be applied in the fabrication of nanostructures.
引用
收藏
页码：41 / +
页数：2
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