Safe and reliable mode of near-field scanning optical fiber probe

被引：0
|
作者：
Xiang, SB [1 ]
Cui, GZ [1 ]
Xiang, X [1 ]
Yang, HD [1 ]
Zhang, TH [1 ]
机构：
[1] Zhengzhou Inst Light Ind, Dept Tech Phys, Zhengzhou 450002, Henan, Peoples R China
来源：
PROGRESS IN SAFETY SCIENCE AND TECHNOLOGY, VOL 4, PTS A and B | 2004年 / 4卷
关键词：
near-field scanning optical microscope; optical fiber probe; control system; safe scanning; precision positioning;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A fiber probe-based positioning scan method was developed, whose precision can come to 0.8 mum. And a set of microscope system was designed using this method, where scanning probe microscope (SPM) combined with optical microscope was manipulated. This design can effectively solve the inherent disadvantages of SPM technology, which makes SPM scan and image more safely, reliably, conveniently and rapidly.
引用
收藏
页码：3019 / 3022
页数：4
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