Design, fabrication, and characterization of Mach-Zehnder interferometers

被引：38
|
作者：
Saghaei, Hamed [1 ]
Elyasi, Payam [1 ,2 ]
Karimzadeh, Rouhollah [3 ]
机构：
[1] Islamic Azad Univ, Shahrekord Branch, Dept Elect Engn, Shahrekord, Iran
[2] Islamic Azad Univ, Bushehr Branch, Dept Elect Engn, Bushehr, Iran
[3] Shahid Beheshti Univ, Fac Phys, GC Evin, Tehran 19839, Iran
来源：
PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS | 2019年 / 37卷
关键词：
Mach-Zehnder interferometer; Free spectral range; Electron beam lithography; Fabrication; Monte-Caro analysis; Corner analysis; ELECTRON-BEAM LITHOGRAPHY; PHOTONIC CRYSTAL FIBER; COMPACT;
D O I：
10.1016/j.photonics.2019.100733
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this paper, the effects of physical parameters on the performance of unbalanced Mach-Zehnder interferometers (MZIs) are numerically studied by solving Maxwell's equations on a cross-section of the waveguide using finite-difference eigenmode method. The MZIs are fabricated by the electron beam lithography with a single etch process on a silicon-on-insulator wafer. The transmission profiles and free spectral ranges (FSRs) of the fabricated MZIs are also measured using a custom-built automated measurement setup and compared with the simulation results of Corner analysis and Monte-Carlo analysis methods. Our comparison reveals that the measured FSRs of the fabricated MZIs are in the range determined by the Monte-Carlo analysis. While all measured FSRs are less than the FSRs indicated by the Corner analysis. Therefore, Monte-Carlo analysis can be used as an accurate numerical method for the study of photonic integrated circuits before fabrication.
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页数：10
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