Various Shapes of Plasma Spokes Observed in HiPIMS

被引：4
|
作者：
Hecimovic, Ante [1 ]
von Keudell, Achim [1 ]
Schulz-von der Gathen, Volker [1 ]
Winter, Joerg [1 ]
机构：
[1] Ruhr Univ Bochum, Dept Expt Phys 2, D-44801 Bochum, Germany
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2014年 / 42卷 / 10期
关键词：
Plasma diagnostic; plasma measurements; plasma waves;
D O I：
10.1109/TPS.2014.2330454
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A time-resolved analysis of the emission of power impulse magnetron sputtering plasmas reveals inhomogeneities in the form of rotating spokes. The shape of these spokes depends on the target material in a characteristic manner; the peculiar shape of the emission profiles is explained by the localization of the sputtering process as being governed by Ar gas rarefaction and the local dynamics of secondary electrons generation. This general picture is able to explain the observed emission patterns for different target materials as presented.
引用
收藏
页码：2810 / 2811
页数：2
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