Absolute and high precision 3 degrees of freedom position sensor

被引：0
|
作者：
Cosandier, F. [1 ]
Canales, C. [1 ]
Boetsch, G. [1 ]
Clavel, R. [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Robot Syst LSRO2, CH-1015 Lausanne, Switzerland
来源：
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期
关键词：
Position Sensor; Absolute; Digital; Rotation; Low-cost; CCD;
D O I：
10.1016/j.proche.2009.07.339
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
We present a compact 3 degrees of freedom (dof) (X-Y-theta z) absolute position sensor offering a sub-micrometric resolution. The travelling range is 15x15mm(2) (translations) and +/- 180 degrees (rotation), with an absolute precision better than 10 mu m over the whole travelling range and of less than 1 mu m of resolution (0.02 degrees for rotation). The position acquisition frequency is 10Hz. The sensor is composed of a CCD camera chip, a silicon target with a pattern of holes constituting a digital code and a luminescent polymer sheet to light the holes. The reading of the pattern code is performed by image processing.
引用
收藏
页码：1359 / 1362
页数：4
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