Multi-photon Response of Photon-number-resolving Superconducting Single Photon Detector

被引:0
|
作者
Gu, P. [1 ]
Zhao, L. M. [1 ]
Wan, C. [1 ]
Zhang, L. B. [1 ]
Kang, L. [1 ]
Wu, P. H. [1 ]
机构
[1] Nanjing Univ, RISE, Nanjing 210093, Jiangsu, Peoples R China
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new photon-number-resolving superconducting single photon detector is fabricated and tested. To integrate the resistors connected to the nanowire, we used one step of electron-beam lithography and four subsequent photolithography steps. A micro cavity was introduced to the structure in order to gain relatively high quantum efficiency. The device fabricated could resolve 6 photons.
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