A multi-transducer near field acoustic levitation system for noncontact transportation of large-sized planar objects

被引：34
|
作者：
Amano, T
Koike, Y
Nakamura, K
Ueha, S
Hashimoto, Y
机构：
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
[2] Kaijo Corp, Tokyo 2058607, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 5B期
关键词：
acoustic levitation; noncontact suspension; noncontact transportation; radiation pressure; actuator; high power ultrasonics;
D O I：
10.1143/JJAP.39.2982
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new noncontact transportation system, which consists of multiple ultrasonic transducers and operates based on near-field acoustic levitation, is proposed to transport a large-sized planar object such as a glass substrate for liquid crystal devices. Using the proposed systems consisting of two and three transducers, the suspension characteristics of the levitated objects are studied as functions of both size difference and angles between the vibration systems and the levitated object. As a result, the holding force is proved to increase as the angle increases and is maximum when the horizontal dimensions of the system and the object coincide.
引用
收藏
页码：2982 / 2985
页数：4
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