Enhancing quality of carbon nanotubes through a real-time controlled CVD process with application to next-generation nanosystems

被引:1
|
作者
Laxminarayana, K [1 ]
Jalili, N [1 ]
机构
[1] Clemson Univ, Dept Mech Engn, Smart Struct & Nanoelectromech Syst Lab, Clemson, SC 29634 USA
关键词
control of nanomanufacturing processes; NEMS; CVD; nanostructures;
D O I
10.1117/12.539582
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nanocrystals and nanostructures will be the building blocks for future materials that will exhibit enhanced or entirely new combinations of properties with tremendous opportunity for novel technologies that can have far-reaching impact on our society. It is, however, realized that a major challenge for the near future is the design, synthesis and integration of nanostructures to develop functional nanosystems. In view of this, this exploratory research seeks to facilitate the development of a controlled and deterministic framework for nanomanufacturing of nanotubes as the most suitable choice among nanostructures for a plethora of potential applications in areas such as nanoelectronic devices, biological probes, fuel cell electrodes; supercapacitors and filed emission devices. Specifically, this paper proposes to control and maintain the most common nanotube growth parameters (i.e., reaction temperature and gas flow rate) through both software and hardware modifications. The influence of such growth parameters in a CVD process on some of the most vital and crucial aspects of nanotubes (e.g., length, diameter, yield, growth rate and structure) can be utilized to arrive at some unique and remarkable properties for the nanotubes. The objective here is, therefore, to control the process parameters to pinpoint accuracy, which would enable us to fabricate-nanotubes having the desired properties and: thereby maximize their ability to-function at its fullest potential. To achieve this and in order to provide for experimental validation of the proposed research program, an experimental test-bed using the nanotube processing test chamber and a mechatronics workstation are being-constructed.
引用
收藏
页码:135 / 146
页数:12
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