X-ray LIGA Microfabricated Circuits for a Sub-THz Wave Folded Waveguide Traveling-Wave-Tube Amplifier

We report experimental results on the microfabrication of three types of folded waveguide circuits with a high aspect ratio by using a high-energy X-ray LIGA technique. A W-band folded waveguide with a total of 80 periods was designed for a traveling-wave-tube (TWT) amplifier operating at 90 GHz-100 GHz. The measured return loss and insertion loss of the W-band fabricated circuit were-10 dB and 0.42 dB/cm, respectively. A G-band circuit showed a higher insertion loss of 1.57 dB/cm. An additional circuit fabrication for a 850-GHz folded waveguide TWT was also successfully carried out. The broad-wall angle measured with respect to the narrow wall of the rectangular waveguide was very close to 90 degrees, indicating an excellent resolution compared to that of other microfabrication techniques, such as deep reactive ion etching (DRIE) and ultraviolet (UV) lithography, electroplating, and polymer replication (LIGA).