Precise micro flow rate measurements by a laser Doppler velocity profile sensor with time division multiplexing

This paper presents the measurement of flow rate inside a microchannel by using a laser Doppler technique. For this application a novel laser Doppler velocity profile sensor has been developed. Instead of parallel fringe systems, two superposed fan-like fringe systems with opposite gradients are employed to determine the velocity distribution inside the microchannel directly. The sensor utilizes the time division multiplexing technique to discriminate both fringe systems. A velocity uncertainty of 0.18% and a spatial resolution of 960 nm are demonstrated in the flow, which is the highest spatially resolved measurement by a laser Doppler technique published to date. Flow rate measurements, in the range of 30 mu l min(-1), with a statistical uncertainty of 5 x 10(-4) are further presented. In comparison to a reference, by precise weighing, the mean deviation between both measurement principles amounts to 1%. With the advantage of high spatial resolution with simultaneous low velocity uncertainty, the laser Doppler velocity profile sensor offers a new tool for microfluidic diagnostics, e. g. in lab-on-a-chip systems or for drug delivery, which requires very small flow rates.