Multiple charge ion beam generation with a 2.45 GHz electron cyclotron resonance ion source

被引:6
|
作者
Xu, Yuan [1 ,2 ]
Peng, ShiXiang [1 ,2 ]
Ren, HaiTao [1 ,2 ]
Wen, JiaMei [1 ,2 ]
Zhang, AiLin [3 ]
Zhang, Tao [1 ,2 ]
Zhang, JingFeng [1 ,2 ]
Wu, WenBin [1 ,2 ]
Guo, ZhiYu [1 ,2 ]
Chen, JiaEr [1 ,2 ,3 ]
机构
[1] Peking Univ, State Key Lab Nucl Phys & Technol, Beijing 100871, Peoples R China
[2] Peking Univ, Inst Heavy Ion Phys, Beijing 100871, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1007/s11433-016-9029-y
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Multiple charge ion beam generation with a 2.45 GHz electron cyclotron resonance ion source
    Yuan Xu
    ShiXiang Peng
    HaiTao Ren
    JiaMei Wen
    AiLin Zhang
    Tao Zhang
    JingFeng Zhang
    WenBin Wu
    ZhiYu Guo
    JiaEr Chen
    [J]. Science China(Physics,Mechanics & Astronomy), 2017, Mechanics & Astronomy)2017 (06) : 79 - 82
  • [2] Multiple charge ion beam generation with a 2.45 GHz electron cyclotron resonance ion source
    Yuan Xu
    ShiXiang Peng
    HaiTao Ren
    JiaMei Wen
    AiLin Zhang
    Tao Zhang
    JingFeng Zhang
    WenBin Wu
    ZhiYu Guo
    JiaEr Chen
    [J]. Science China Physics, Mechanics & Astronomy, 2017, 60
  • [3] Beam tests of a compact 2.45 GHz electron cyclotron resonance ion source
    Shibuya, S
    Fukushima, T
    Kimura, T
    Muramatsu, M
    Kitagawa, A
    Yamada, S
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1171 - 1173
  • [4] Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source
    Liu, Y. G.
    Liu, J. L.
    Wu, Q.
    Sun, L. T.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2020, 91 (02):
  • [5] Study of the Characteristics of a 2.45 GHz Electron Cyclotron Resonance Ion Source
    K. Berestov
    S. Bogomolov
    K. Kuzmenkov
    [J]. Physics of Particles and Nuclei Letters, 2023, 20 : 1246 - 1249
  • [6] Study of the Characteristics of a 2.45 GHz Electron Cyclotron Resonance Ion Source
    Berestov, K.
    Bogomolov, S.
    Kuzmenkov, K.
    [J]. PHYSICS OF PARTICLES AND NUCLEI LETTERS, 2023, 20 (05) : 1246 - 1249
  • [7] First results of the 2.45 GHz Oshima electron cyclotron resonance ion source
    Asaji, T.
    Nakamura, T.
    Furuse, M.
    Hitobo, T.
    Uchida, T.
    Muramatsu, M.
    Kato, Y.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (02):
  • [8] Development of a 2.45 GHz electron cyclotron resonance ion source for ion-implanter application
    Sekiguchi, M
    Matsushita, H
    Jonoshita, I
    Kabasawa, M
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 837 - 839
  • [9] Experimental study of ion extraction from a 2.45 GHz electron cyclotron resonance multicharged ion source
    Kato, Y
    Sugiyama, S
    Ishii, S
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (02): : 601 - 603
  • [10] Plasma potential profile in a 2.45 GHz electron cyclotron resonance multicharged ion source
    Kato, Y
    Ishii, S
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 1176 - 1178