Frenkel pairs and impurity-defect interactions in p-type silicon irradiated with fast electrons and gamma-rays at low temperatures

被引:3
|
作者
Emtsev, VV [1 ]
Dedek, U
Ehrhart, P
Kervalishvili, PD
Margaryan, MA
Poloskin, DS
Zillgen, H
机构
[1] AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[2] Forschungszentrum Julich GMBH, Inst Festkorperforsch, D-52425 Julich, Germany
[3] Inst Stable Isotopes, GE-380000 Tbilisi, Georgia
关键词
silicon; shallow acceptors; irradiation; electrical measurements;
D O I
10.4028/www.scientific.net/MSF.258-263.575
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Investigations of defect production and annealing in moderately and heavily doped p-Si subjected to low-temperature electron irradiation at 2.5 MeV have been made. Removal rates of charge carriers were found to be about 2 cm(-1) over the doping range studied. Recovery of the charge carrier concentration is not significant after annealing at room temperature. Substantial annealing of defects responsible for carrier removal takes place at temperatures higher than 600 K. However, recovery of the hole mobility displays puzzling behaviour. Data on removal rates of charge carriers in lightly doped p-Si subjected to low-temperature gamma-irradiation suggest that electronic excitation conditions during irradiation can strongly affect defect formation processes.
引用
收藏
页码:575 / 580
页数:6
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