Formation of copper micro-wiring by laser direct writing

被引：20
|
作者：
Watanabe, Akira [1 ]
Miyashita, Tokuji [1 ]
机构：
[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, Sendai, Miyagi 9808577, Japan
来源：
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2007年 / 20卷 / 01期
关键词：
copper micro-wiring; laser direct writing; metal nanoparticle; nano-heater effect;
D O I：
10.2494/photopolymer.20.115
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
[No abstract available]
引用
收藏
页码：115 / 116
页数：2
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