Femtosecond Laser Microfabrication for THz Components

In recent years, laser micromachining has made impressive gains in terms of accuracy, scalability and surface finish. Moreover, the availability of femtosecond lasers yields ablation without melting. Surfaces processed in this fashion exhibit less structural damage and are expected to have a higher damage thresholds. In this paper we will review several case studies of laser-microfabricated THz components. These will include corrugated waveguides for narrowband and quasi-optical mirror-like structures for broadband THz applications.