Depth-sensing using AFM contact-resonance imaging and spectroscopy at the nanoscale

被引:18
|
作者
Ma, C. [1 ]
Wang, W. [1 ]
Chen, Y. [1 ]
Arnold, W. [2 ]
Chu, J. [1 ]
机构
[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Anhui, Peoples R China
[2] Saarland Univ, Dept Mat Sci & Engn, D-66123 Saarbrucken, Germany
基金
中国国家自然科学基金;
关键词
ATOMIC-FORCE MICROSCOPY; ACOUSTIC MICROSCOPY; PROPERTY MEASUREMENTS; ULTRASONIC-WAVES; STIFFNESS; MODULUS;
D O I
10.1063/1.5113567
中图分类号
O59 [应用物理学];
学科分类号
摘要
Subsurface metrology techniques are of significant importance at the nanoscale, for instance, for imaging buried defects in semiconductor devices and in intracellular structures. Recently, ultrasonic-based atomic force microscopy has attracted intense attention also for subsurface imaging. Despite many applications for measuring the real and imaginary part of the local surface modulus, the physical mechanism for subsurface imaging is not fully understood. This prevents accurate data interpretation and quantitative reconstruction of subsurface features and hinders the development of an optimized experimental and engineering setup. In this paper, we present quantitative depth-sensing of subsurface cavity structures using contact-resonance atomic force microscopy (CR-AFM) imaging and spectroscopy. Our results indicate that for imaging subsurface cavity structures using CR-AFM, the induced contact stiffness variations are the key contrast mechanism. The developed algorithm based on this mechanism allows one to precisely simulate the experimental image contrasts and give an accurate prediction of the detection depth. The results allow a better understanding of the imaging mechanism of ultrasonic-based AFM and pave the way for quantitative subsurface reconstruction.
引用
收藏
页数:8
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