The Signal Interrogation Technology of MEMS Optical Fiber Pressure Sensor

被引：0
|
作者：
Wang Cong-fei [1 ]
Wang Guang-long [1 ]
Chen Jian-hui [1 ]
Dun Yi [1 ]
机构：
[1] Coll Mech Engn, Inst Nanotechnol & Microsyst, Shijiazhuang, Hebei Province, Peoples R China
来源：
ICIA: 2009 INTERNATIONAL CONFERENCE ON INFORMATION AND AUTOMATION, VOLS 1-3 | 2009年
关键词：
WHITE-LIGHT INTERFEROMETRY;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper describes the Microelectromechanical Systems (MEMS) optical fiber pressure sensor signal interrogation systems. The white-light interferometry system, component test system (CTS) and self-calibrated interferometric intensity based (SCIIB) system are introduced. The signal of the optical fiber pressure sensor processing schemes is presented. With the system the cavity of the MEMS optical fiber pressure sensor is measured with high resolution by fringe analysis. The dynamic range of the measurement is large, which is from several microns to millimeters.
引用
收藏
页码：1260 / 1263
页数：4
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