Predominant physical quantity dominating macroscopic surface shape of diamond synthesized by microwave plasma CVD

被引：27

作者：

Yamada, Hideaki ^{[1
]}

Mokuno, Yoshiaki ^{[1
]}

Chayahara, Akiyoshi ^{[1
]}

Horino, Yuji ^{[1
]}

Shikata, Shin-ichi ^{[1
]}

机构：

[1] AIST, Diamond Res Ctr, Ikeda, Osaka 5638577, Japan

来源：

关键词：

microwave plasma CVD; homoepitaxial growth; single crystal diamond; simulation;

D O I：

10.1016/j.diamond.2006.11.067

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To specify the most important factor which dominates macroscopic surface shape of single crystal diamond synthesized by microwave plasma chemical vapor deposition, we have carried out numerical simulations and corresponding experiments. Comparison between the numerical and experimental results has shown that temperature distribution on the top surface of the substrate predominantly controls the surface shape. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：576 / 580

页数：5

共 50 条

[1] Diamond films synthesized by microwave plasma CVD
Zhang, Zhiming, 1600, (42):
[2] THERMAL-CONDUCTIVITY OF DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA CVD
ONO, A
BABA, T
FUNAMOTO, H
NISHIKAWA, A
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (10): : L808 - L810
[3] Effect of argon addition on single crystal diamond synthesized by microwave plasma CVD
Hubei Province Key Laboratory of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan, China
不详
Rengong Jingti Xuebao, 2 (337-341):
[4] NUCLEATION CONTROL OF DIAMOND SYNTHESIZED BY MICROWAVE PLASMA CVD ON CEMENTED CARBIDE SUBSTRATE
ITOH, H
OSAKI, T
IWAHARA, H
SAKAMOTO, H
JOURNAL OF MATERIALS SCIENCE, 1991, 26 (14) : 3763 - 3768
[5] DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA CVD OF ETHYL-ALCOHOL, ETC
WATANABE, I
SUGATA, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (08): : 1397 - 1400
[6] Diamond films synthesized by microwave plasma CVD of ethyl alcohol, etc.
Watanabe, Ichiro
Sugata, Ken
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1988, 27 (08): : 1397 - 1400
[7] Effect of pulsed methane flow on nanostructured diamond films synthesized by microwave plasma CVD
Shanov, V
Ramamurti, R
Singh, RN
INNOVATIVE PROCESSING AND SYNTHESIS OF CERAMICS, GLASSES, AND COMPOSITES VII, 2003, 154 : 283 - 294
[8] Formation of diamond and nanocrystalline diamond films by microwave plasma CVD
Hiramatsu, M
Lau, CH
Bennett, A
Foord, JS
THIN SOLID FILMS, 2002, 407 (1-2) : 18 - 25
[9] Controlling fabrication of (111) crystal surface dominating diamond film by DC ARC plasma jet CVD
School of Material Science and Engineering,, University of Science and Technology of Beijing, Beijing 100083, China
不详
Rengong Jingti Xuebao, 2006, 3 (478-480):
[10] Raman spectra of a cross section of a large single crystal diamond synthesized by using microwave plasma CVD
Feng, Z. B.
Chayahara, A.
Mokuno, Y.
Yamada, H.
Shikata, S.
DIAMOND AND RELATED MATERIALS, 2010, 19 (2-3) : 171 - 173

← 1 2 3 4 5 →