Vibration sensor using optical-fiber cantilever with bulb-lens

被引：30
|
作者：
Kimura, M [1 ]
Toshima, K [1 ]
机构：
[1] Tohoku Gakuin Univ, Fac Engn, Dept Elect Engn, Tagajo, Miyagi 985, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期
关键词：
optical-fiber sensors; vibration sensors; bulb-lens; cantilevers; micromachining;
D O I：
10.1016/S0924-4247(98)00005-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new design of a bulb-lens for emitted light collimation and a vibration sensor based on an optical-fiber cantilever with a bulb-lens fabricated using the silicon microfabrication technique are proposed and demonstrated. Nearly flat frequency dependence of the optical output is observed in the frequency range 40-1200 Hz under constant acceleration. Acceleration resolutions of 0.3 and 1.0 m s(-2) are attained in the transmission-type and reflection-type devices, respectively. Vibrations with many modes in a vibrator are analyzed by fast Fourier transform (FFT) analysis of optical signals from these vibration sensors. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：178 / 183
页数：6
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