Spin-cast planarization of liquid-crystal-on-silicon microdisplays

被引：7
|
作者：
Schuck, MH [1 ]
McKnight, DJ [1 ]
Johnson, KM [1 ]
机构：
[1] UNIV COLORADO,DEPT ELECT & COMP ENGN,BOULDER,CO 80309
来源：
OPTICS LETTERS | 1997年 / 22卷 / 19期
关键词：
D O I：
10.1364/OL.22.001512
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A simplified method for planarizing liquid-crystal-on-silicon (LCOS) backplanes is presented. The method relies on the planarizing capability of spin-cast benzocyclobutene (BCB) polymeric resin. BCB planarization shows a sixfold reduction in step height on the surface of a typical LCOS backplane. Contact with the underlying pixel circuitry is made by dry etching through openings in the BCB layer. Reflective metal (87% reflectivity) is deposited over the planarized surface and patterned to form high-aperture-ratio pixel mirrors (84%). An average resistance of 0.75 Ohm per via was achieved with 3.6-mu m-diameter vias in 2-mu m-thick BCB. The method and the results of this LCOS backplane planarization and postprocessing are described. (C) 1997 Optical Society of America.
引用
收藏
页码：1512 / 1514
页数：3
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