Combined Finite Difference - Lumped Modelling of Fluid Loaded Cmut Arrays

被引：3
|
作者：
Meynier, Cyril [1 ]
Teston, Franck [1 ]
Jeanne, Edgard
Bernard, Jean Edouard [1 ]
Certon, Dominique [1 ]
机构：
[1] Univ Tours, UMR Inserm, CNRS, U930,FRE 2448, Tours, France
来源：
INTERNATIONAL CONGRESS ON ULTRASONICS, PROCEEDINGS | 2010年 / 3卷 / 01期
关键词：
cMUTs; acoustic radiation;
D O I：
10.1016/j.phpro.2010.01.131
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
This paper describes a model based on mixed finite-difference - lumped modeling to compute the frequency response of cMUTs in array element. Electrical impedance and laser interferometry measurements are presented and compared with theory.
引用
收藏
页码：1017 / 1023
页数：7
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