Aligned and coiled carbon nanotubes by microwave chemical vapor deposition

被引：1
|
作者：
Xie, JN [1 ]
Varadan, VK [1 ]
机构：
[1] Penn State Univ, Ctr Engn Elect & Acoust Mat & Devices, University Pk, PA 16802 USA
来源：
SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY | 2004年 / 5389卷
关键词：
aligned carbon nanotube; coiled carbon nanotube; microwave CVD;
D O I：
10.1117/12.548435
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Carbon nanotubes with certain shapes and 2D or 3D structures have versatile potential applications. Aligned and coiled carbon nanotubes were synthesized by microwave chemical vapor deposition. Due to its faster heating and cooling processes, microwave chemical vapor deposition can be an economic method for various carbon material fabrications. Scanning electron microscope (SEM) and transmission electron microscope (TEM) were performed to observe the micro- and nano-structure of these materials. Their properties and potential applications were also discussed.
引用
收藏
页码：147 / 158
页数：12
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