Transparent Capacitive Micromachined Ultrasound Transducer Arrays for Multimodal Imaging Systems

被引：0
|
作者：
Ilkhechi, Afshin Kashani [1 ]
Zemp, Roger [1 ]
机构：
[1] Univ Alberta, Edmonton, AB T6G 2V4, Canada
来源：
OPTO-ACOUSTIC METHODS AND APPLICATIONS IN BIOPHOTONICS V | 2021年 / 11923卷
关键词：
D O I：
10.1117/12.2615883
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We introduce transparent TOBE CMUT arrays for multimodal imaging systems, combining ultrasound with photoacoustic and optical imaging systems. We designed and fabricated a 128-element lambda-pitch transducers with high transparency ranging from visible to near-infrared. (C) 2021 The Author(s)
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页数：3
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