Comparative study on the excitation mechanism of chromium emission lines in the argon radio-frequency inductively-coupled plasma, nitrogen microwave induced plasma, and argon or nitrogen glow discharge plasmas

被引:18
|
作者
Wagatsuma, K
Danzaki, Y
Nakahara, T
机构
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Univ Osaka Prefecture, Grad Sch Engn, Dept Appl Chem, Sakai, Osaka 591, Japan
关键词
Boltzmann plot; chromium; argon glow discharge plasma; argon inductively coupled plasma; nitrogen glow discharge plasma; nitrogen microwave induced plasma; excitation mechanism; charge-transfer collision;
D O I
10.1081/SL-120021177
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Boltzmann plots of both atomic and ionic chromium emission lines are investigated to compare the excitation mechanisms in four different plasmas: an argon inductively-coupled plasma (Ar-ICP), a nitrogen high-power microwave induced plasma (N-2-MIP), an argon glow discharge plasma (Ar-GDP), and a nitrogen glow discharge plasma (N-2-GDP). The plots of the atomic lines and the ionic lines give both linear relationships as well as similar excitation temperatures in the case of the Ar-ICP, the N-2-MIP, and the N-2-GDP. It implies that a thermodynamic process such as electron collision would control their excitations. However, only in the case of the ionic-line plot in the Ar-GDP, a departure from linear relationship is observed and the estimated excitation temperature is rather higher than that with the atomic lines, meaning that a specific excitation mechanism exists in the Ar-GDP. A possible explanation for these results is that a charge-transfer collision between chromium atom and argon ion plays a dominant role in exciting highly-lying energy levels of chromium ion, especially in the Ar-GDP.
引用
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页码:99 / 115
页数:17
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