Plasma diagnostics for surface modification of polymers

被引：43
|
作者：
Meichsner, J [1 ]
Zeuner, M [1 ]
Krames, B [1 ]
Nitschke, M [1 ]
Rochotzki, R [1 ]
Barucki, K [1 ]
机构：
[1] Tech Univ Chemnitz, Inst Phys, D-09107 Chemnitz, Germany
来源：
SURFACE & COATINGS TECHNOLOGY | 1998年 / 98卷 / 1-3期
关键词：
ellipsometry; energy selective mass spectrometry; FTIR spectroscopy; Langmuir probe measurements; optical spectroscopy; plasma; plasma diagnostics; polymer;
D O I：
10.1016/S0257-8972(97)00298-3
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Capacitively coupled RF discharge in oxygen is investigated for polymer surface modification. The discharge is studied by means of ion analysis at the powered and grounded discharge electrode, optical emission spectroscopy and Langmuir probe measurements. Correlations are shown between discharge properties, internal plasma parameters and the surface modification of polyethylene (PE) and polystyrene (PS) characterized by FTIR (ATR) spectroscopy and ellipsometry. (C) 1998 Elsevier Science S.A.
引用
收藏
页码：1565 / 1571
页数：7
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