Characterization of high quality ZnTe heteroepitaxy layers using low temperature buffer layers

被引:0
|
作者
Park, SH [1 ]
Chang, JH
Lee, JY
Kim, HS
Yang, M
Ahn, HS
Yi, SN
Oh, DC
Koo, BH
Yao, T
机构
[1] Korea Maritime Univ, Dept Semicond Phys, Pusan 606791, South Korea
[2] Tohoku Univ, CIR, Sendai, Miyagi 9088577, Japan
关键词
ZnTe; molecular beam epitaxy; low-temperature buffer; dislocation;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
High quality ZnTe heteroepitaxial layers are achieved by inserting a thin ZnTe buffer layer at low growth temperature (LT-ZnTe buffer). It has been characterized by using low temperature photoluminescence, high resolution X-ray diffraction scans, and transmission electron micrography. The ZnTe heteroepitaxy layer with a LT-buffer shows strong luminescence intensity near band emission and a narrow line width of X-ray rocking curve as narrow as 42 arcsec in (004) reflection. The dislocation density is estimated as 1.3 x 10(6) cm(-2) by multiple XRD measurements with different indices. A cross sectional view by transmission electron microscopy confirms high structural quality of a ZnTe layer grown on LT-buffers.
引用
收藏
页码:S767 / S770
页数:4
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