Scheduling for the Dedicated Machine Constraint in Semiconductor Manufacturing Using a Goal-Oriented Approach

Semiconductor manufacturing with the dedicated machine constraint is a new challenge for scheduling problems. Previous studies have either not taken this constraint into account or proposed heuristic approaches which might not provide the efficient makespan and the efficient time. This paper proposes a goal-oriented approach called the Optimization of Makespan, Load, and Execution time (OMLE) approach which considers the above issues. The desired goals find a schedule for machines which simultaneously optimizes the makespan and the load among machines in an efficient time. Experiments are presented to validate the approach.