Micro-cantilevers for thin films Young's modulus

被引：0
|
作者：
McShane, G. J. [1 ]
Boutchich, M. [1 ]
Phani, S. [1 ]
Moore, D. F. [1 ]
Lu, T. J. [2 ]
机构：
[1] Univ Cambridge, Dept Engn, Cambridge CB12 1PZ, England
[2] Xi An Jiao Tong Univ, Sch Aerosp, Xian, Peoples R China
来源：
IUTAM SYMPOSIUM ON MECHANICAL BEHAVIOR AND MICRO-MECHANICS OF NANOSTRUCTURED MATERIALS | 2007年 / 144卷
基金：
中国国家自然科学基金; 英国工程与自然科学研究理事会;
关键词：
MEMS materials; thin films; cantilevers; scanning surface profiler; finite element methods; elastic modulus;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
A simple and effective characterisation technique based on micro-cantilever beams for thin film materials using commonly available equipment - scanning surface profiler - is described. The advantages of this class of techniques are simplicity, speed, cost and a wide applicability. A technique for extracting the Young's modulus from static deflection data is developed and validated in experiments on thin film specimens of silicon nitride deposited on a silicon substrate under different conditions. Finite element analysis is used to assess the influence of factors affecting the bending of thin films, and thus guide the analysis of microcantilever deflection data for reliable characterisation of the material.
引用
收藏
页码：71 / +
页数：2
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