A surface-micro-machined tunneling-based accelerometer

被引：0
|
作者：
Chang, R [1 ]
She, M [1 ]
机构：
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
来源：
MEMS COMPONENTS AND APPLICATIONS FOR INDUSTRY, AUTOMOBILES, AEROSPACE, AND COMMUNICATION II | 2003年 / 4981卷
关键词：
D O I：
10.1117/12.472877
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
A surface-micro-machined tunneling-based accelerometer has been designed. A simpler fabrication process has been proposed and illustrated. Performance optimization has been tried by tuning the tunneling tip, beam and proof-mass design.
引用
收藏
页码：243 / 246
页数：4
相关论文
共 50 条
  • [1] Tunneling-based SRAM
    Van der Wagt, JPA
    PROCEEDINGS OF THE IEEE, 1999, 87 (04) : 571 - 595
  • [2] A Micro machined Electrochemical Angular Accelerometer Based on lnterdigital Electrodes
    Liang, Tian
    Wang, Junbo
    Chen, Deyong
    Chen, Jian
    Liu, Bowen
    Xu, Chao
    Qi, Wenjie
    She, Xu
    Chen, Mingwei
    Zhong, Anxiang
    Duan, Yumo
    2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2021, : 1813 - 1816
  • [3] A micro-machined differential resonance accelerometer based on silicon on quartz method
    Li, Cun
    Zhao, Yulong
    Li, Bo
    Cheng, Rongjun
    Sun, Dengqiang
    Han, Chao
    Zhao, You
    SENSORS AND ACTUATORS A-PHYSICAL, 2017, 253 : 1 - 9
  • [4] Design, fabrication and measurement of a resonant tunneling diode based micro accelerometer
    Xiong, Jijun
    Mao, Haiyang
    Zhang, Wendong
    Xue, Chenyang
    2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 382 - 386
  • [5] A low-voltage tunneling-based silicon microaccelerometer
    Yeh, CW
    Najafi, K
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1997, 44 (11) : 1875 - 1882
  • [6] Quality of Micro Machined Surface
    Shi, Wen-Tian, 1600, Chongqing Wujiu Periodicals Press (46):
  • [7] Research on nonlinear vibration in micro-machined resonant accelerometer
    Department of Precision Instruments and Mechanology, Tsinghua University, 100084, Beijing, China
    Sensors Transducers, 2012, SPEC. 1 (14-21):
  • [8] Research on Nonlinear Vibration in Micro-machined Resonant Accelerometer
    Zhao Shuming
    Liu Yunfeng
    Wang Fan
    Dong Jingxin
    NANOTECHNOLOGY 2012, VOL 2: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, 2012, : 637 - 640
  • [9] Use of micro-machined accelerometer in today's world
    Majlis, BY
    Sooriakumar, K
    Naidu, S
    Patmon, B
    2002 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2002, : 9 - 14
  • [10] Gigahertz modulation of tunneling-based GaAs light emitters
    VanHoof, C
    DeNeve, H
    Mertens, R
    Romandic, I
    Goovaerts, E
    Borghs, G
    IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (11) : 1463 - 1465
12345