Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

被引：0

作者：

Penttila, Antti ^{[1
]}

Maconi, Goran ^{[1
]}

Kassamakov, Ivan ^{[1
]}

Gritsevich, Maria ^{[1
]}

Helander, Petteri ^{[1
]}

Puranen, Tuomas ^{[1
]}

Haeggstrom, Edward ^{[1
]}

Muinonen, Karri ^{[1
,2
]}

机构：

[1] Univ Helsinki, Dept Phys, POB 64, FIN-00014 Helsinki, Finland

[2] Finnish Geospatial Res Inst FGI, Geodeetinrinne 2, Masala 02430, Finland

来源：

MODELING ASPECTS IN OPTICAL METROLOGY VI | 2017年 / 10330卷

基金：

欧洲研究理事会;

关键词：

Scatterometry; polarimetry; single particle scattering; Mueller matrix measurement; ultrasonic levitation;

D O I：

10.1117/12.2267863

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

引用

页数：7

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