Improving the uncertainty of coordinate measuring machines

被引：0

作者：

Jusko, O ^{[1
]}

Härtig, F ^{[1
]}

Kniel, K ^{[1
]}

Neugebauer, M ^{[1
]}

Neuschaefer-Rube, U ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1 | 2004年

关键词：

coordinate measuring machine; dimensional; metrology; error separation; measurement uncertainty;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

PTB has developed several measurement concepts which allow to lower the measurement uncertainty of ID (length comparator), 2D (contour measurement) and 3D coordinate measuring machines. These include the application of laser interferometry in classical Abbe arrangements and in a new tracking laser interferometer set-up, the design and application of special-purpose embodied standards for length and contour measurements, and the development of micro-probes for scanning measurement tasks. The underlying concepts, the measurement improvements achieved, and typical application fields are presented.

引用

页码：45 / 54

页数：10

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