Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect

被引：0

作者：

Shyu, Ruey Fang ^{[1
]}

Yang, Hsiharng ^{[2
,3
]}

Tsai, Wen-Ren ^{[2
]}

Tsai, Jhy-Cherng ^{[4
]}

机构：

[1] Natl Formosa Univ, Dept Mech Mfg Engn, Yunlin 632, Taiwan

[2] Natl Chung Hsing Univ, Inst Precis Engn, Taichung 402, Taiwan

[3] Natl Chung Hsing Univ, Ctr Nanosci & Nanotechnol, Taichung 402, Taiwan

[4] Natl Chung Hsing Univ, Dept Mech Engn, Taichung 402, Taiwan

来源：

DTIP 2006: SYMPOSIUM ON DESIGN,TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS 2006 | 2006年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven. Photoresist AZ4620 was used to pattern micro-columns with different diameters 60, 70 and 80 mu m. A thermal reflow process then was applied to melt these micro-column patterns resulted in micro-ball lens array. The achieved micro-ball lens array with diameter 98 mu m was fabricated using 80 mu m in diameter patterns. This method provides a simple fabrication process and low material cost.

引用

页码：110 / +

页数：2

共 50 条

[1] Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect
Shyu, Ruey Fang
Yang, Hsiharng
Tsai, Wen-Ren
Tsai, Jhy-Cherng
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2007, 13 (11-12): : 1601 - 1606
[2] Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect
Ruey Fang Shyu
Hsiharng Yang
Wen-Ren Tsai
Jhy-Cherng Tsai
Microsystem Technologies, 2007, 13 : 1601 - 1606
[3] Micro-ball Lens Array Formation Using Different Hydrophilic Pattern Effect
Yang, Chih-Wei
Chen, Yan-Ting
Yang, Hsiharng
Wang, Yi-Ta
2016 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2016,
[4] Waveguide-coupled micro-ball lens array suitable for mass fabrication
Chang, Lantian
Dijkstra, Meindert
Ismail, Nur
Pollnau, Markus
de Ridder, Rene M.
Worhoff, Kerstin
Subramaniam, Vinod
Kanger, Johannes S.
OPTICS EXPRESS, 2015, 23 (17): : 22414 - 22423
[5] Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers
Yang, H
Chao, CK
Lin, CP
Shen, SC
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (02) : 277 - 282
[6] Rapid fabrication of a micro-ball lens array by extrusion for optical fiber applications
Shen, S. C.
Huang, J. C.
OPTICS EXPRESS, 2009, 17 (15): : 13122 - 13127
[7] Micro-ball lens based optical biosensors
John, V.
Muhammad, M. Z.
Irawati, N.
Ali, N. M.
Harun, S. W.
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2015, 17 (11-12): : 1656 - 1660
[8] Micro-ball lens structure fabrication based on drop on demand printing the liquid mold
Zhu, Xiaoyang
Zhu, Li
Chen, Hejuan
Yang, Lijun
Zhang, Weiyi
APPLIED SURFACE SCIENCE, 2016, 361 : 80 - 89
[9] Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array category: Micro opto electro mechanical systems
Lin, YS
Pan, CT
Lin, KL
Chen, SC
Yang, JJ
Yang, JP
14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2001, : 337 - 340
[10] Batch assembly micro-ball lens array for Si-based optical coupling platform in free space
Shen, SC
Pan, CT
Chou, HP
Chou, MC
OPTICAL REVIEW, 2001, 8 (05) : 373 - 377

← 1 2 3 4 5 →