Deep X-ray Lithography beamline at the Kurchatov Synchrotron Radiation Source: First results

被引：2
|
作者：
Artemiev, AN [1 ]
Busheva, IN
Kolyasnikov, VA
Kovachov, GA
Latish, OE
Martynenko, VV
Moryakov, VP
Nikitin, BI
Odintsov, DG
Peredkov, SS
Rakhimbabaev, TY
Stankevitch, VG
Tzvid, ES
Schmidt, A
Feiertag, B
机构：
[1] IV Kurchatov Atom Energy Inst, Russian Res Ctr, Moscow 123182, Russia
[2] IMM Inst Microtechnol GmbH, D-55129 Mainz, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1998年 / 405卷 / 2-3期
关键词：
D O I：
10.1016/S0168-9002(96)01129-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A Deep X-ray Lithography (DXRL) beamline at the Kurchatov Synchrotron Radiation Source (KSRS) has been constructed and commissioned. For the irradiation a simple exposure apparatus and synchrotron radiation with a critical energy of about 7 keV was used. Samples with resist thickness of 300 mu m and 500 mu m have been exposed using a test mask. SEM results are shown.
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收藏
页码：496 / 499
页数：4
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