Coupling effects of the impact factors in micro-scale on the performance of aerostatic guideway

Purpose The purpose of this study is to investigate the coupling effects of the velocity slip, rarefaction effect and effective viscosity of the gas film on the performance of the aerostatic guideway in micro-scale and improve the analysis precision of the static performance of aerostatic guideway. Design/methodology/approach The corresponding model of the gas film flow with consideration of the velocity slip, rarefaction effect and effective viscosity of the gas film in micro-scale is proposed. By solving the corresponding model, the bearing capacity and the stiffness of the aerostatic guideway are obtained through the pressure distributions of the air cavity. Through comparing the bearing capacity and the stiffness in different situations, the couple effects of the three factors are analyzed. Finally, the experimental results about the stiffness are obtained and the contrast between the simulation stiffness and the tested stiffness is achieved. Findings Through comparing the coupling effects of the micro scale factors under different conditions on the performance of the aerostatic guideway, it was found that when comparing the effects of a single factor, the effect of the first-order slip is the largest. When two factors are randomly combined, velocity slip and viscosity of the gas film is the largest, but these coupling effects are less than the effect of considering three factors simultaneously. Originality/value It is essential to consider the first-order velocity slip, the flow factor Q and the effective viscosity when analyzing the static performance of the aerostatic guideway in micro-scale. This makes studying the performance of the aerostatic guideway in micro-scale feasible and improves the machine's accuracy.