Optimal design of induction heating equipment for high-speed processing of a semiconductor

被引：5
|
作者：
Okamoto, Y [1 ]
Imai, T [1 ]
Miyagi, D [1 ]
Takahashi, N [1 ]
Ozaki, K [1 ]
Ono, H [1 ]
Uchida, N [1 ]
机构：
[1] Okayama Univ, Dept Elect & Elect Engn, Okayama, Japan
来源：
COMPEL-THE INTERNATIONAL JOURNAL FOR COMPUTATION AND MATHEMATICS IN ELECTRICAL AND ELECTRONIC ENGINEERING | 2004年 / 23卷 / 04期
关键词：
heating; optimization techniques; finite element analysis;
D O I：
10.1108/03321640410553472
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform heating is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each cad is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution on graphite.
引用
收藏
页码：1045 / 1052
页数：8
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