A New Capacitance-to-Frequency Converter for On-Chip Capacitance Measurement and Calibration in CMOS Technology

被引:2
|
作者
Zhu, Dongdi [1 ]
Mo, Jiongjiong [1 ]
Xu, Shiyi [1 ]
Shang, Yongheng [1 ]
Wang, Zhiyu [1 ]
Huang, Zhengliang [1 ]
Yu, Faxin [1 ]
机构
[1] Zhejiang Univ, Sch Aeronaut & Astronaut, Hangzhou 310027, Zhejiang, Peoples R China
基金
中国国家自然科学基金;
关键词
Capacitance-to-frequency converter; Charge-based capacitance measurement; On-chip capacitance measurement and calibration; CMOS technology;
D O I
10.1007/s10836-016-5584-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, a new capacitance-to-frequency converter using a charge-based capacitance measurement (CBCM) circuit is proposed for on-chip capacitance measurement and calibration. As compared to conventional capacitor measurement circuits, the proposed technique is able to represent the capacitance in term of the frequency so that the variations can be easily handled in measurement or calibration circuits. Due to its simplicity, the proposed technique is able to achieve high accuracy and flexibility with small silicon area. Designed using standard 180 nm CMOS technology, the core circuit occupies less than 50 mu m x 50 mu m while consuming less than 60 mu W at an input frequency of 10 MHz. Post-layout simulation shows that the circuit exhibits less than 3 % measurement errors for fF to pF capacitances while the functionality has been significantly improved.
引用
收藏
页码:393 / 397
页数:5
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