Progress and Prospect of Optical Freeform Surface Measurement

被引:29
|
作者
Zhu Rihong [1 ,2 ]
Sun Yue [1 ,2 ]
Shen Hua [1 ,2 ]
机构
[1] Nanjing Univ Sci & Technol, Sch Elect & Opt Engn, Nanjing 210094, Jiangsu, Peoples R China
[2] Nanjing Univ Sci & Technol, MIIT Key Lab Adv Solid Laser, Nanjing 210094, Jiangsu, Peoples R China
关键词
measurement; optical freeform surface; surface measurement; profilometry; structured light; interferometry; SUBAPERTURE STITCHING INTERFEROMETRY; PHASE-MEASURING DEFLECTOMETRY; HEAD-MOUNTED DISPLAY; FREE-FORM SURFACE; FIELD-OF-VIEW; ASPHERIC SURFACE; MEASUREMENT MACHINE; SHAPE MEASUREMENT; DESIGN; SYSTEM;
D O I
10.3788/AOS202141.0112001
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An optical freeform surface has been recognized as a revolutionary element in a modern optical system because of its powerful ability of simultaneous aberration correction and structural optimization. However, the complex shape of its surface brings enormous difficulties and challenges to the precise measurement, which limits its manufacture level and has been one of the bottlenecks of its broad applications. Currently, the main measurement methods of an optical freeform surface are mainly developed from the ideas of aspheric measurement technologies. In this paper, we reviewed the development of the optical freeform surface measurement methods, especially focused on several typical measurement methods and their characteristics, and looked forward to the development trend of freeform surface measurement in future.
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页数:18
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