Chemical vapor deposition of MgO films using a new single source

被引：0
|
作者：
Koh, W [1 ]
Ku, SJ [1 ]
Kim, Y [1 ]
机构：
[1] Korea Res Inst Chem Technol, Adv Mat Div, Taejon 305600, South Korea
来源：
BULLETIN OF THE KOREAN CHEMICAL SOCIETY | 1998年 / 19卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：281 / 283
页数：3
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