High power durable saw antenna duplexers for W-CDMA with emaxially grown aluminum electrodes

被引：7
|
作者：
Nakagawara, O [1 ]
Saeki, M [1 ]
Tsubaki, N [1 ]
Taniguchi, N [1 ]
Ikada, K [1 ]
Watanabe, M [1 ]
Inoue, K [1 ]
Hagi, T [1 ]
Makino, T [1 ]
Arai, S [1 ]
机构：
[1] Murata Mfg Co Ltd, Nagaokakyoushi, Kyoto 6178555, Japan
来源：
2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年
关键词：
D O I：
10.1109/ULTSYM.2002.1193349
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We have fabricated surface acoustic wave antenna duplexers for W-CDMA with epitaxial aluminum electrodes. Devices with epitaxial electrodes have achieved 2-5 x 10(6) hours estimated lifetime at input power of 0.8W and in an ambient temperature of 50 degreesC, which is several orders longer than that with polycrystalline electrode. Since stress migration is attributed to self-diffusion of aluminum atoms mainly ruled with the grain boundary region in the film, the epitaxial aluminum film that is highly oriented and has extremely less grain boundary makes it possible to suppress stress migration and improve power durability. A new epitaxial relationship has been found to be Al(111)<011> // Ti(001)<100> // LiNbO(3)(001)<100>, not based on the rotation angles between 63degrees to 70degrees of theta rotated Y-X LiNbO(3) substrates. Titanium intermediate layer plays an important role to relax the lattice mismatch between LiNbO(3)(001) and Al(111) planes and to form epitaxially grown aluminum films. The intriguing crystal growth mechanism will be discussed in detail.
引用
收藏
页码：43 / 46
页数：4
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